The 4-circle diffractometer with x,y,z-table employs a CCD detector (13 µm pixel size) behind a micro channel collimator for position resolved diffraction of polycrystalline materials [1]. The collimator array suppresses crossfire of radiation scattered from different locations on the specimen thus allowing the position resolved investigation of large areas in a single shot (in contrast to conventional µ-beam techniques). This makes the technique especially suited for dynamic processes like re-crystallization [2]. Further applications include the position resolved determination of composition, strain and orientation (texture) [3, 4].
An additional scintillation detector behind a Soller collimator serves for measurements integrating over the illuminated area and adjustment (definition of regions of interest).